Tailored nanochannels of nearly cylindrical geometry analysed by small angle X-ray scattering

被引：12
作者：
Kuttich B. [1 ]
Engel M. [1 ]
Trautmann C. [1 ,2 ]
Stühn B. [1 ]
机构：
[1] Technische Universität Darmstadt, Darmstadt
[2] GSI Helmholtzzentrum für Schwerionenforschung GmbH, Technische Universität Darmstadt, Darmstadt
来源：
Kuttich, B. (b.kuttich@fkp.physik.tu-darmstadt.de) | 1600年 / Springer Verlag卷 / 114期
关键词：
X ray scattering;
D O I：
10.1007/s00339-013-8167-4
中图分类号：
学科分类号：
摘要：
High aspect-ratio nanochannels were fabricated by irradiating polyimide films with swift heavy ions of 2.2 GeV energy and subsequently sensitising and etching the ion tracks in hydrogen peroxide and sodium hypochloride, respectively. The nanochannels were analysed by means of small angle X-ray scattering in combination with a new form factor model that considers bi-conical channel geometry. This approach allows us to tune the etching parameters for controlled channel shape adjustment. © 2013 Springer-Verlag Berlin Heidelberg.
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页码：387 / 392
页数：5
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