Modeling of fatigue in polysilicon MEMS structures

被引：0

作者：

K. Bhalerao

A. B. O. Soboyejo

W. O. Soboyejo

机构：

[1] The Ohio State University,Department of Food, Agricultural and Biological Engineering

[2] Princeton University,Department of Mechanical and Aerospace Engineering, Princeton Materials Institute

来源：

Journal of Materials Science | 2003年 / 38卷

关键词：

Fatigue; Fatigue Life; Modeling Effort; Empirical Approach; Polysilicon;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This paper presents an empirical approach to the modeling of fatigue in silicon MEMS structures. The approach is based on the regression analysis of stress-life data obtained from prior fatigue experiments on polysilicon and single crystal silicon. The possible directions for future modeling efforts are identified at the end of the paper, following a discussion on the implications of the current model fatigue life prediction.

引用

页码：4157 / 4161

页数：4

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