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Chongqing Technol & Business Univ, Chongqing Key Lab Micronano Syst & Intelligent Tra, Collaborat Innovat Ctr Micronano Transduct & Intel, Chongqing Key Lab Coll & Univ Micronano Syst Techn, Nanan Dist, Chongqing, Peoples R China
Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Int Joint Lab Micronano Mfg & Measurement Technol, Xian 710049, Peoples R China Chongqing Technol & Business Univ, Chongqing Key Lab Micronano Syst & Intelligent Tra, Collaborat Innovat Ctr Micronano Transduct & Intel, Chongqing Key Lab Coll & Univ Micronano Syst Techn, Nanan Dist, Chongqing, Peoples R China