Low Voltage Contrast with an SEM Transmission Electron Detector

被引：0

作者：

François Grillon

机构：

[1] Centre des Matériaux,

[2] ENSMP/ARMINES/CNRS UMR 7633,undefined

来源：

Microchimica Acta | 2006年 / 155卷

关键词：

Key words: SEM Transmission Electron Detector; low voltage SEM; STEM contrast.;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The images obtained with a transmission electron detector in low voltage SEM show an evolution of the well known dark field and bright field contrast with the accelerating voltage. Monte Carlo simulations explain these contrasts by the evolution of the electron scattering angle and stopping power of the thin foil with the accelerating voltage.

引用

页码：157 / 161

页数：4