Obtaining of Smooth High-Precision Surfaces by the Mechanical Lapping Method

被引：0

作者：

M. N. Toropov

A. A. Akhsakhalyan

M. V. Zorina

N. N. Salashchenko

N. I. Chkhalo

Yu. M. Tokunov

机构：

[1] Institute for Physics of Microstructures,

[2] Russian Academy of Sciences,undefined

[3] Moscow Institute of Physics and Technology,undefined

来源：

Technical Physics | 2020年 / 65卷

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D O I：

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摘要：

引用

页码：1873 / 1879

页数：6

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