Readout characteristics of flexible monolithic optical head slider combined with visible laser light guide

 Optical near-field recording is a candidate technology for overcoming the diffraction limit of conventional optical recording. In our previous work, we proposed a novel optical head slider for near-field recording that we call a flexible optical head slider. An air-bearing pad pattern is formed on the apex of a cantilever-like polymeric waveguide so that, by using the cantilever itself as the slider suspension, a single body structure incorporates the functions of the flying slider, suspension, and waveguide. This structure can be expected to provide several important advantages by miniaturizing head assemblies; simplifying the assembly and optical trimming processes; and producing a lighter head, thus allowing a wider tracking bandwidth. In this paper, we report the read-out signal evaluation of the flexible optical head slider. Using a slider with a sub-micron sized aperture, read-out of a test metal-patterned ROM (Read Only Memory) disk was successfully demonstrated down to a 0.2 μm linewidth line and space pattern.