Nano-Sized Copper Films Prepared by Magnetron Sputtering

被引:0
作者
V. S. Sulyaeva
V. R. Shayapov
M. M. Syrokvashin
A. K. Kozhevnikov
M. L. Kosinova
机构
[1] Nikolaev Institute of Inorganic Chemistry,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
来源
Journal of Structural Chemistry | 2023年 / 64卷
关键词
thin copper films; magnetron sputtering; optical properties; surface resistivity.;
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中图分类号
学科分类号
摘要
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页码:2438 / 2450
页数:12
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