共 50 条
[21]
Effect of H2O on Preheating Combustion Characteristics in O2/CO2 and O2/N2 Atmospheres
[J].
Journal of Thermal Science,
2023, 32
:2235-2242
[24]
Photoresist removal using an O2/N2 medium pressure plasma jet with high speed wafer scanning: Unimplanted resist studies
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2009, 27 (06)
:2480-2486