Preparation and optimization of MTO/Ag/MTO transparent flexible film based on co-sputtering at room temperature

被引:1
作者
Su, Min [1 ]
Shi, Suheng [4 ]
Chen, Jiarong [1 ]
Ren, Dasen [1 ]
Yue, Lan [1 ,2 ]
Meng, Fanxin [3 ]
机构
[1] Guizhou Minzu Univ, Sch Phys & Mechatron Engn, Guiyang 550025, Peoples R China
[2] Chengdu Univ, Sch Elect Informat & Elect Engn, Chengdu 610106, Peoples R China
[3] Chengdu High Tech Dev Co Ltd, Chengdu 610041, Peoples R China
[4] Guizhou Minzu Univ, Sch Chem Engn, Guiyang 550025, Peoples R China
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2024年 / 130卷 / 06期
基金
中国国家自然科学基金;
关键词
SnO2:Mo (MTO); Transparent flexible electrode; Triple-layer film; OMO structure; THIN-FILMS; TRANSMITTANCE; STABILITY;
D O I
10.1007/s00339-024-07557-w
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The transparent flexible SnO2:Mo/Ag/SnO2:Mo (MTO/Ag/MTO) triple-layer film was prepared based on co-sputtering at room temperature for the first time. The optimization of the MTO layer thickness on the optical and electrical properties of the triple-layer films was investigated and the bending stability was verified by bending test. It was found that the visible light transmittance of the triple-layer film increases first and then decreases with the increase of MTO layer thickness, which indicates that the MTO layer thickness plays an important role in optimizing the visible light transmittance of the triple-layer film. Also, as the thickness of the MTO layer increases, the triple-layer film carrier concentration decreases and the sheet resistance increases. Therefore, the triple-layer film with excellent properties was obtained via the optimization of the MTO layer thickness to 40 nm, which has a maximum figure of merit of 2.0 x 10(-2) Omega(-1), a high visible light transparency of 82% and a low sheet resistance of 6.9 Omega/sq. Meanwhile, the prepared triple-layer film also has excellent mechanical flexibility (curvature radius R >= 4 mm, and the number of bending times is 10,000).
引用
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页数:7
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