Effect of sulfur incorporation on solution-processed ZTO thin-film transistors

被引:0
作者
Sang-A Oh
Kyeong Min Yu
So-Hyun Jeong
Byung Seong Bae
Eui-Jung Yun
机构
[1] Hoseo University,Department of Display Engineering
[2] Hoseo University,College of Green Energy Semiconductor Engineering and Department of System Control Engineering
来源
Journal of the Korean Physical Society | 2015年 / 66卷
关键词
Sol-gel; Solution process; Oxide TFT; Sulfur incorporated Zinc-Tin-Oxide TFT;
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中图分类号
学科分类号
摘要
In this research, we investigated the electrical properties of solution-processed sulfur (S)-incorporated zinc-tin-oxide (S-ZTO) thin-film transistors (TFTs). The best device characteristics, which include a threshold voltage of −0.74 V, a sub-threshold swing of 0.67 V/dec, an on/off current ratio of 8.31 × 105, and a mobility of 0.70 cm2/Vs, were observed for 0.06-M S-ZTO TFTs. The device properties of the 0.06-M S-ZTO TFTs were similar to those of ZTO TFTs whereas the illumination stress stabilities and the hysteresis characteristics of the transfer curve for 0.06-M S-ZTO TFTs were better than those for ZTO TFTs. The X-ray diffraction analysis for the S-ZTO thin films also showed that tin (Sn) atoms bonded chemically with S atoms, suggesting that S atoms occupied oxygen sites, which, in turn, the reduced the number of oxygen vacancies. Therefore, the improved stabilities observed in S-ZTO TFTs are attributed to the reduction in the number of oxygen vacancies due to replacement of O by S.
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页码:1144 / 1148
页数:4
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