X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films

被引：0

作者：

V. G. Kesler

M. L. Kosinova

Yu. M. Rumyantsev

V. S. Sulyaeva

机构：

[1] Russian Academy of Sciences,A. V. Rzhanov Institute of Semiconductor Physics, Siberian Division

[2] Russian Academy of Sciences,A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division

来源：

Journal of Structural Chemistry | 2012年 / 53卷

关键词：

X-ray photoelectron spectroscopy; Auger spectroscopy; PECVD; BC; N; films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

X-ray photoelectron and Auger spectroscopy are used to investigate the chemical composition of BCxNy films synthesized by PECVD from different initial gas mixtures in the temperature range 473–723 K. Main principles and features of the film formation are found. It is shown that the chemical composition of BCxNy films significantly depends on the synthesis parameters, which enables targeted control of their physical properties. The obtained data are discussed.

引用

页码：699 / 707

页数：8

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