X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films

被引：0
|
作者：
V. G. Kesler
M. L. Kosinova
Yu. M. Rumyantsev
V. S. Sulyaeva
机构：
[1] Russian Academy of Sciences,A. V. Rzhanov Institute of Semiconductor Physics, Siberian Division
[2] Russian Academy of Sciences,A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division
来源：
Journal of Structural Chemistry | 2012年 / 53卷
关键词：
X-ray photoelectron spectroscopy; Auger spectroscopy; PECVD; BC; N; films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
X-ray photoelectron and Auger spectroscopy are used to investigate the chemical composition of BCxNy films synthesized by PECVD from different initial gas mixtures in the temperature range 473–723 K. Main principles and features of the film formation are found. It is shown that the chemical composition of BCxNy films significantly depends on the synthesis parameters, which enables targeted control of their physical properties. The obtained data are discussed.
引用
收藏
页码：699 / 707
页数：8
相关论文
共 50 条
  • [11] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF PUSB
    BAPTIST, R
    CHAYROUSE, J
    COURTEIX, D
    HEINTZ, L
    DAMIEN, D
    WOJAKOWSKI, A
    JOURNAL DE PHYSIQUE, 1983, 44 (02): : 241 - 246
  • [12] X-RAY PHOTOELECTRON-AUGER ELECTRON SPECTROSCOPIC STUDY OF INITIAL OXIDATION OF CHROMIUM METAL
    ALLEN, GC
    TUCKER, PM
    WILD, RK
    JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS II, 1978, 74 : 1126 - 1140
  • [13] X-RAY PHOTOELECTRON AND AUGER SPECTROSCOPIC STUDY OF UNDERPOTENTIAL DEPOSITION OF AG AND CU ON PT ELECTRODES
    HAMMOND, JS
    WINOGRAD, N
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (06) : 826 - 833
  • [14] CHARACTERIZATION OF CDTE POLYCRYSTALLINE FILMS BY X-RAY PHOTOELECTRON AND AUGER SPECTROSCOPIES
    ZELAYA, O
    SANCHEZSINENCIO, F
    GONZALEZHERNANDEZ, J
    PENA, JL
    FARIAS, MH
    COTAARAIZA, L
    HIRATA, GA
    RABAGO, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02): : 245 - 248
  • [15] X-Ray Photoelectron Spectroscopic Study on the Synthesis of Copper Sulphide in LB Films( Ⅱ )
    CHEN Hui-juan
    Chemical Research in Chinese Universities, 1992, (04) : 395 - 398
  • [16] X-RAY PHOTOELECTRON AND AUGER SPECTROSCOPIC STUDIES OF THE OXIDATION OF URANIUM AND THORIUM SULFIDES
    PERRY, DL
    COLMENARES, C
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 195 : 186 - INOR
  • [17] AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF CHEMICAL ETCHING AND CHEMOMECHANICAL POLISHING OF HGCDTE
    CHANG, WH
    LEE, T
    LAU, WM
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (09) : 4816 - 4819
  • [18] X-ray photoelectron spectroscopic analysis of HfSiON thin films
    Zhang, Lulu
    Terauchi, Shin-ya
    Azuma, Yasushi
    Fujimoto, Toshiyuki
    SURFACE AND INTERFACE ANALYSIS, 2008, 40 (13) : 1701 - 1704
  • [19] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF SPRAYED CDS FILMS
    KOLHE, S
    KULKARNI, SK
    NIGAVEKAR, AS
    BHIDE, VG
    JOURNAL OF MATERIALS SCIENCE, 1987, 22 (03) : 1067 - 1080
  • [20] Effect of X-rays on the surface composition of polyphosphazene: X-ray photoelectron spectroscopic study
    A. V. Naumkin
    I. O. Volkov
    D. R. Tur
    Polymer Science Series A, 2009, 51 : 537 - 541
12345