X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films

被引：0
|
作者：
V. G. Kesler
M. L. Kosinova
Yu. M. Rumyantsev
V. S. Sulyaeva
机构：
[1] Russian Academy of Sciences,A. V. Rzhanov Institute of Semiconductor Physics, Siberian Division
[2] Russian Academy of Sciences,A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division
来源：
Journal of Structural Chemistry | 2012年 / 53卷
关键词：
X-ray photoelectron spectroscopy; Auger spectroscopy; PECVD; BC; N; films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
X-ray photoelectron and Auger spectroscopy are used to investigate the chemical composition of BCxNy films synthesized by PECVD from different initial gas mixtures in the temperature range 473–723 K. Main principles and features of the film formation are found. It is shown that the chemical composition of BCxNy films significantly depends on the synthesis parameters, which enables targeted control of their physical properties. The obtained data are discussed.
引用
收藏
页码：699 / 707
页数：8
相关论文
共 50 条
  • [1] X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films
    Kesler, V. G.
    Kosinova, M. L.
    Rumyantsev, Yu M.
    Sulyaeva, V. S.
    JOURNAL OF STRUCTURAL CHEMISTRY, 2012, 53 (04) : 699 - 707
  • [2] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF THE COMPOSITION AND STATE OF ALUMINUM FILMS ON THE SURFACE OF DIELECTRICS
    IVANOVA, TM
    POLYAKOVA, EI
    INORGANIC MATERIALS, 1988, 24 (03) : 323 - 325
  • [3] AUGER-ELECTRON AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF ELECTROCHEMICAL NICKEL-BORON FILMS
    NOVOTORTSEVA, IG
    GAEVSKAYA, TV
    INORGANIC MATERIALS, 1995, 31 (08) : 969 - 973
  • [4] AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF SODIUM METAL AND SODIUM OXIDE
    BARRIE, A
    STREET, FJ
    JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1975, 7 (01) : 1 - 31
  • [5] AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIC DEPTH PROFILING TECHNIQUES APPLIED TO ULTRATHIN TITANIUM FILMS
    LOFTON, CP
    SWARTZ, WE
    THIN SOLID FILMS, 1978, 52 (02) : 271 - 280
  • [6] X-RAY PHOTOELECTRON AND AUGER-ELECTRON SPECTROSCOPIC STUDY OF MG-MONTMORILLONITE
    SEYAMA, H
    SOMA, M
    CHEMISTRY LETTERS, 1981, (07) : 1009 - 1012
  • [7] X-RAY PHOTOELECTRON AND AUGER ANALYSIS OF THIN-FILMS
    CHANG, CC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 276 - 281
  • [8] THE CHARACTERIZATION AND MICROANALYSIS OF FILMS WITH AUGER AND X-RAY PHOTOELECTRON SPECTROSCOPIES
    GRANT, JT
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06): : 2900 - 2901
  • [9] X-ray photoelectron spectroscopic study on electrochromic molybdenum oxide films
    Zhang, YZ
    Kuai, SL
    Huang, YS
    Wang, ZC
    Hu, XF
    ACTA PHYSICO-CHIMICA SINICA, 2001, 17 (01) : 79 - 82
  • [10] X-ray photoelectron spectroscopic study of fluorofullerenes
    Dement'ev, AP
    Boltalina, OV
    Ponomarev, DB
    Galeva, NA
    FULLERENES FOR THE NEW MILLENNIUM, 2001, 2000 (11): : 559 - 566
12345