Effect of a Conducting Film of Finite Thickness Deposited on a Resonator with a Lateral Electric Field on Its Characteristics

被引:0
作者
Zaitsev B.D. [1 ]
Teplykh A.A. [1 ]
Semyonov A.P. [1 ]
Borodina I.A. [1 ]
机构
[1] Kotelnikov Institute of Radio Engineering and Electronics, Saratov Branch, Russian Academy of Sciences, Saratov
基金
俄罗斯基础研究基金会;
关键词
701.1 Electricity: Basic Concepts and Phenomena;
D O I
10.3103/S1062873821060241
中图分类号
学科分类号
摘要
Abstract: A theoretical and numerical study is performed of the effect of the thickness and the coefficients of the elasticity, viscosity, and electrical conductivity of a film deposited on a free side of a piezoelectric resonator with a lateral electric field on its characteristics. It is shown that an increase in the mechanical impedance of the film and its conductivity lower the maximum value of the real part of the resonator’s electrical impedance. © 2021, Allerton Press, Inc.
引用
收藏
页码:608 / 611
页数:3
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