Gate dielectric reliability and instability in GaN metal-insulator-semiconductor high-electron-mobility transistors for power electronics

被引:0
作者
Jesús A. del Alamo
Alex Guo
Shireen Warnock
机构
[1] Massachusetts Institute of Technology,Microsystems Technology Laboratories
来源
Journal of Materials Research | 2017年 / 32卷
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摘要
GaN field-effect transistors with impressive power switching characteristics have been demonstrated. Preventing their widespread field deployment are reliability and instability concerns. Some emanate from the use of a dielectric in the gate stack. Under typical operation, the gate dielectric comes periodically under intense electric field. This causes trapping and detrapping of electrons and introduces transient shifts in the threshold voltage, a phenomenon known as Bias-Temperature Instability (BTI). A high electric field also results in the formation of defects inside the dielectric. Over time, the defects accumulate and eventually result in the abrupt creation of a conducting path that shorts the dielectric and renders the device inoperable. This process, known as Time-Dependent Dielectric Breakdown (TDDB), often imposes a maximum lifetime for the FET technology. This article presents a methodology for the study of BTI and TDDB in insulated-gate GaN FETs. Our findings paint a picture of BTI and TDDB that in many respects is similar to that of Si transistors but with some unique characteristics. Understanding the physics and developing appropriate lifetime models is essential to enabling the deployment of this important new power electronics technology.
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页码:3458 / 3468
页数:10
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  • [1] Nakamura S(2015)Nobel lecture: Background story of the invention of efficient blue InGaN light emitting diodes Rev. Mod. Phys. 87 1139-undefined
  • [2] Asif Khan M(1992)Atomic layer epitaxy of GaN over sapphire using switched metalorganic chemical vapor deposition Appl. Phys. Lett. 60 1366-undefined
  • [3] Skogman RA(2002)High mobility AlGaN/GaN heterostructures grown by plasma-assisted molecular beam epitaxy on semi-insulating GaN templates prepared by hydride vapor phase epitaxy J. Appl. Phys. 92 338-undefined
  • [4] Van Hove JM(1993)High electron mobility transistor based on a GaN–Al Appl. Phys. Lett. 63 1214-undefined
  • [5] Olson DT(2012)Ga IEEE Trans. Microwave Theory Tech. 60 1764-undefined
  • [6] Kuznia JN(2012)N heterojunction IEEE Electron Device Lett. 33 667-undefined
  • [7] Manfra MJ(2013)A review of GaN on SiC high electron-mobility power transistors and MMICs IEEE Trans. Electron Devices 60 3119-undefined
  • [8] Weimann NG(2009)CMOS process-compatible high-power low-leakage AlGaN/GaN MISHEMT on silicon Microelectron. Reliab. 49 1200-undefined
  • [9] Hsu JWP(2012)AlGaN/GaN-based HEMTs failure physics and reliability: Mechanisms affecting gate edge and Schottky junction Microelectron. Reliab. 52 2188-undefined
  • [10] Pfeiffer LN(2006)GaN HEMT reliability Microelectron. Reliab. 46 270-undefined