Influence of the Synthesis Conditions and Tin Nanoparticles on the Structure and Properties of a-C:H〈Sn〉 Composite Thin Films

被引:0
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作者
A. P. Ryaguzov
R. R. Nemkayeva
N. R. Guseinov
机构
[1] National Nanotechnology Laboratory of Open Type (NNLOT),
[2] Kazakh National University,undefined
来源
Semiconductors | 2018年 / 52卷
关键词
Combined Target; Composite Films; Film Synthesis; Carbon Matrix; SiO2 Substrate;
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中图分类号
学科分类号
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页码:1327 / 1333
页数:6
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