Influence of the Synthesis Conditions and Tin Nanoparticles on the Structure and Properties of a-C:H〈Sn〉 Composite Thin Films

被引：0
|
作者：
A. P. Ryaguzov
R. R. Nemkayeva
N. R. Guseinov
机构：
[1] National Nanotechnology Laboratory of Open Type (NNLOT),
[2] Kazakh National University,undefined
来源：
Semiconductors | 2018年 / 52卷
关键词：
Combined Target; Composite Films; Film Synthesis; Carbon Matrix; SiO2 Substrate;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
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页码：1327 / 1333
页数：6
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