Synthesis of In2O3 Thin Films from Indium Thin Film by Hot-Water Oxidation Method

被引：0
作者：
Subramani Shanmugan
Devarajan Mutharasu
机构：
[1] Universiti Sains Malaysia (USM),Nano Optoelectronics Research Laboratory, School of Physics
来源：
Metallurgical and Materials Transactions A | 2012年 / 43卷
关键词：
Oxygen Vacancy; In2O3; Indium Oxide; Soda Lime Glass Substrate; In2O3 Film;
D O I：
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学科分类号：
摘要：
Radio-frequency (RF)-sputtered indium thin films were prepared and processed in ultrapure water at 368 K (95 °C) for various time durations. The processed samples were poor in crystalline quality and indexed as cubic phase for the samples processed for more than 12 hours. A rhombohedral to cubic phase was also observed. Photoluminescence (PL) and Raman spectra showed few dominant peaks at ~385, ~515, and ~675 and at ~203 and 495 cm−1 as oxygen deficient cubic In2O3 with nanostructured In2O3, respectively.
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页码：6 / 9
页数：3
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