Estimation of the stresses in a coating growing on a flat plate under nonisothermal conditions

被引：0

作者：

S. N. Sorokova

A. G. Knyazeva

机构：

[1] Tomsk Polytechnical University,

[2] Institute of Strength Physics and Materials Science of the Siberian Branch of the Russian Academy of Sciences,undefined

来源：

Russian Physics Journal | 2009年 / 52卷

关键词：

mechanical stresses; growing coating;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A mathematical model of a coating which grows during magnetron sputtering has been formulated and investigated. To estimate the average mechanical stresses, both the thermal and the chemical diffusion contribution are taken into account. It has been shown that the kinetics of the reaction on the surface is no less important in the evolution of stresses than the relationship between the mechanical properties of the growing coating and of the substrate.

引用

页码：1309 / 1316

页数：7