Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator

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作者
Philippe Vachon
Srinivas Merugu
Jaibir Sharma
Amit Lal
Eldwin J. Ng
Yul Koh
Joshua E.-Y. Lee
Chengkuo Lee
机构
[1] National University of Singapore,Department of Electrical and Computer Engineering
[2] Technology and Research (A*STAR),Institute of Microelectronics, Agency for Science
[3] Cornell University,SonicMEMS Laboratory, School of Electrical and Computer Engineering
[4] University of Technology Sydney,School of Electrical and Data Engineering
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Microsystems & Nanoengineering | / 10卷
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This article presents an in-depth exploration of the acoustofluidic capabilities of guided flexural waves (GFWs) generated by a membrane acoustic waveguide actuator (MAWA). By harnessing the potential of GFWs, cavity-agnostic advanced particle manipulation functions are achieved, unlocking new avenues for microfluidic systems and lab-on-a-chip development. The localized acoustofluidic effects of GFWs arising from the evanescent nature of the acoustic fields they induce inside a liquid medium are numerically investigated to highlight their unique and promising characteristics. Unlike traditional acoustofluidic technologies, the GFWs propagating on the MAWA’s membrane waveguide allow for cavity-agnostic particle manipulation, irrespective of the resonant properties of the fluidic chamber. Moreover, the acoustofluidic functions enabled by the device depend on the flexural mode populating the active region of the membrane waveguide. Experimental demonstrations using two types of particles include in-sessile-droplet particle transport, mixing, and spatial separation based on particle diameter, along with streaming-induced counter-flow virtual channel generation in microfluidic PDMS channels. These experiments emphasize the versatility and potential applications of the MAWA as a microfluidic platform targeted at lab-on-a-chip development and showcase the MAWA’s compatibility with existing microfluidic systems.
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    Merugu, Srinivas
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    Lal, Amit
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