Candidate oxidation resistant coatings via combustion chemical vapor deposition

被引：8

作者：

Shanmugham S. ^{[1
]}

Hendrick M. ^{[1
]}

Richards N. ^{[1
]}

Oljaca M. ^{[1
]}

机构：

[1] MicroCoating Technologies, Inc., Atlanta, GA 30341

来源：

Journal of Materials Science | 2004年 / 39卷 / 1期

关键词：

Oxidation; Polymer; Combustion; Chemical Vapor Deposition; Vapor Deposition;

D O I：

10.1023/B:JMSC.0000008094.12813.0c

中图分类号：

学科分类号：

摘要：

Tantalum oxide, yttria and alumina coatings were grown on single crystal substrates successfully via CCVD. While tantalum oxide and yttria coatings were crystalline at temperatures greater than 1000°C, the alumina coatings were primarily amorphous. Coatings were grown in thickness ranging from 0.1 μm to greater than 1 μm in thickness.

引用

页码：377 / 381

页数：4

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