Drain current multiplication in thin pillar vertical MOSFETs due to depletion isolation and charge coupling

被引:0
作者
M. M. A. Hakim
C. H. de Groot
S. Hall
Peter Ashburn
机构
[1] East West University,Department of Electrical & Electronic Engineering
[2] University of Southampton,Nano Research Group
[3] University of Liverpool,Department of Electrical Engineering & Electronics
来源
Journal of Computational Electronics | 2016年 / 15卷
关键词
Vertical MOSFETs; Partially depleted; Fully depleted; Floating body effects;
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中图分类号
学科分类号
摘要
Drain current multiplication in vertical MOSFETs due to body isolation by the drain depletion region and gate–gate charge coupling is investigated at pillar thicknesses in the range of 200–10 nm. For pillar thickness >120 nm depletion isolation does not occur and hence the body contact is found to be completely effective with no multiplication in drain current, whereas for pillar thicknesses <60 nm depletion isolation occurs for all drain biases and hence the body contact is ineffective. For intermediate pillar thicknesses of 60–120 nm, even though depletion isolation is apparent, the body contact is still effective in improving floating body effects and breakdown. At these intermediate pillar thicknesses, a kink is also observed in the output characteristics due to partial depletion isolation. The charging kink and the breakdown behavior are characterized as a function of pillar thickness, and a transition in the transistor behavior is seen at a pillar thickness of 60 nm. For pillar thickness greater than 60 nm, the voltage at which body charging occurs decreases (and the normalized breakdown current increases) with decreasing pillar thickness, whereas for pillar thickness less than 60 nm, the opposite trend is seen. The relative contributions to the drain current of depletion isolation and the inherent gate–gate charge coupling are quantified. For pillar thickness between 120 and 80 nm, the rise in the drain current is found to be mainly due to depletion isolation, whereas for pillar thicknesses <60 nm, the increase in the drain current is found to be governed by the inherent gate–gate charge coupling.
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页码:839 / 849
页数:10
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