Direct Growth of Graphene on Silicon by Metal-Free Chemical Vapor Deposition

被引:0
|
作者
Lixuan Tai
Daming Zhu
Xing Liu
Tieying Yang
Lei Wang
Rui Wang
Sheng Jiang
Zhenhua Chen
Zhongmin Xu
Xiaolong Li
机构
[1] Chinese Academy of Sciences,Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics
[2] University of Chinese Academy of Sciences,Department of Electronic Engineering
[3] Tsinghua University,undefined
来源
Nano-Micro Letters | 2018年 / 10卷
关键词
Graphene; Silicon; Metal-free CVD; Domain growth;
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