Structural and optical properties of low-temperature hydride-MOCVD AlGaAs/GaAs(100) heterostructures based on omission solid solutions

被引:0
作者
P. V. Seredin
A. V. Glotov
E. P. Domashevskaya
I. N. Arsentyev
D. A. Vinokurov
A. L. Stankevich
I. S. Tarasov
机构
[1] Voronezh State University,Ioffe Physicotechnical Institute
[2] Russian Academy of Sciences,undefined
来源
Semiconductors | 2009年 / 43卷
关键词
GaAs; Epitaxial Film; Diffraction Profile; Metal Sublattice; Sample EM1017;
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学科分类号
摘要
X-ray diffraction, scanning electron microscopy, and IR reflectance spectroscopy were used to study properties of epitaxial low-temperature hydride-MOCVD AlGaAs/GaAs (100) heterostructures. It was found that the variation in the AlGaAs alloy lattice’s parameter with Al content does not obey the classical Vegard’s law, and the lattice parameters are smaller than those of GaAs.
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页码:1610 / 1616
页数:6
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