The glass-molding process for planar-integrated micro-optical component

被引：0
|
作者：
Chien-Yao Huang
Jyh-Rou Sze
Kuo-Cheng Huang
Chao-Hui Kuo
Shih-Feng Tseng
Chang-Pin Chou
机构：
[1] National Applied Research Laboratories,Instrument Technology Research Center
[2] National Chiao Tung University,Department of Mechanical Engineering
来源：
Optical Review | 2011年 / 18卷
关键词：
precision glass-molding technology (PGMT); planar-integrated micro-optical component (PIMOC);
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents a precision glass-molding process to fabricate planar-integrated micro-optical components (PIMOC) applied to a micro projection display system, optical interconnection system and optical storage system. The PIMOC was designed based on wave propagation theory, and fabricated using a glass molding process. Experimental results are discussed in this article. The experiment showed that the PIMOC fabricated in a vacuum environment meets the design value with precision glass-molding technology (PGMT) at a molding force of 2.75 kN, a molding temperature of 750 °C and a cooling rate of 49 °C/min.
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页码：96 / 98
页数：2
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