Electrical properties of R2O–Al2O3–SiO2 glass–ceramics for anodic bonding

Temperature and frequency dependence on electrical properties (dielectric constant, dielectric loss and conductivity) of Li2O–Na2O–K2O–Al2O3–SiO2(R2O–Al2O3–SiO2) system glass–ceramics used as anodic bonding materials were discussed. The results showed that the main crystal phase of glass–ceramics was lithium metasilicate (Li2SiO3). Compared with the parent glass, both the dielectric constant and dielectric loss of glass–ceramics decreased, the dielectric constant and dielectric loss increased gradually with the increasing of the test temperature from room temperature to 400 °C, Testing frequency (30–300 MHz) had very little influence on the dielectric properties of samples. The electrical conductivity of glass–ceramics showed a trend of first decrease and then increase with the increasing of temperature. The glass–ceramics which has a lower dielectric constant, dielectric loss and better stability under high frequency was obtained after an appropriate heat treatment; it could be used as anodic bonding materials under very high frequency.