共 18 条
[1]
Bacher W(1998)Fabrication of LIGA mold inserts Microsyst Technol 4 117-119
[2]
Buser R(2002)MEMS devices for laboratory automation in the biomedical field Mstnews 1/02 10-12
[3]
Gerlach A(2002)Microfabrication of single-use plastic microfluidic devices for high-throughput screening and DNA analysis Microsyst Technol 7 265-268
[4]
Heyderman LJ(2001)Nanofabrication using hot embossing lithography and electroforming Microelectron Eng 57–8 375-380
[5]
Hoeper R(2005)Manufacturing of microfluidic devices in silicon and plastics by deep reactive ion etching Mstnews 2/05 40-41
[6]
Menz A(2002)Hot embossing in microfabrication. Part II: Rheological characterization and process analysis Polymer Eng Sci 42 551-566
[7]
Juang YJ(2002)Hot embossing in microfabrication. Part I: Experimental Polymer Eng Sci 42 539-550
[8]
Lee LJ(2002)Fabrication of plastic microchips by hot embossing Lab Chip 2 1-4
[9]
Koelling YJ(2001)Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection Sens Actuators B Chem 75 142-148
[10]
Juang LJ(2002)Polymer microfabrication technologies Microsyst Technol 8 32-36