Analysis of microstructure replication using vibratory assisted thermal imprint process

被引:0
作者
Amer Sodah
Rimvydas Gaidys
Birutė Narijauskaitė
Rokas Šakalys
Giedrius Janušas
Arvydas Palevičius
Paulius Palevičius
机构
[1] Kaunas University of Technology,Faculty of Mechanical Engineering and Design
[2] Kaunas University of Technology,Faculty of Mathematics and Natural Sciences
来源
Microsystem Technologies | 2019年 / 25卷
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摘要
In this article, thermal imprint process for replication of high-quality microstructures on the surface of polymer is investigated. Vibrations has been previously employed as an additional measure to enhance the replicability of microstructure into the pre-heated polymer. On the other hand, polymer behavior under the action of vibrations is not sufficiently studied. In this article, thermal microstructure replication is modeled and simulated by applying vibratory assisted thermal imprint to provide a better comprehension of the replication process peculiarities that would lead to improvement of the replication process itself. Different aspects of the process are analyzed: depth of imprinted pattern, pressure, traction force, residual field of plastic deformations and stresses. Numerical simulation results are verified experimentally. The results of the research shows that process assistance with vibratory excitation results in higher imprint depth compared with the specimens, imprinted under the identical process conditions without vibratory excitation.
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页码:477 / 486
页数:9
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