Modeling and analysis of electrostatic MEMS filters

We present an analytical model and closed-form expressions describing the response of a tunable MEMS filter made of two electrostatic resonators coupled by a weak microbeam. The model accounts for the filter geometric and electric nonlinearities as well as the coupling between them. It is obtained by discretizing the distributed-parameter system to produce a reduced-order model. We predict the filter deflection and static pull-in voltage by solving a boundary-value problem (BVP). We also solve an eigenvalue problem (EVP) to determine the filter poles (the natural frequencies delineating the filter bandwidth). We found a good agreement between the results obtained using our model and published experimental results. We found that, when the input and output resonators are mismatched, the first mode is localized in the softer resonator whereas the second mode is localized in the stiffer resonator. We demonstrated that mismatch between the resonators can be countermanded by applying different DC voltages to the resonators. As the effective nonlinearities of the filter grow, multi-valued responses appear and distort the filter performance. Once again, we found that the filter can be tuned to operate linearly by choosing a DC voltage that makes the effective nonlinearities vanish.