Strength of optical quality polycrystalline CVD diamond

被引:6
|
作者
Ralchenko V.G. [1 ]
Pleiler E. [2 ]
Sovyk D.N. [1 ]
Konov V.I. [1 ]
机构
[1] Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow
[2] Fraunhofer Institute for Applied Solid State Physics IAF, Freiburg
基金
俄罗斯基础研究基金会;
关键词
Bending strength; CVD diamond; Polycrystalline diamond; Weibull modulus; Young modulus;
D O I
10.1134/S2075113311050273
中图分类号
学科分类号
摘要
The three-point loading method is used to the measure the fracture strength σf of polycrystalline CVD diamond plates with thickness in the range of h = 0.06–1.0 mm. Optical quality samples grown in a microwave plasma using CH4–H2 gas mixtures show an inherently nonuniform structure, the crystallite size varying (increasing) by 1–2 orders of magnitude in traversing from the substrate side to growth side. The value of σf approaches ≈ 2200 MPa for the thinnest film when the fine-grained (substrate) side is under tensile stress, reducing with plate thickness down to ≈ 600 MPa at h ≈1000 μm. The strength is approximately a factor of two lower for the substrate side under tensile stress. In general, the material tested follows Hall–Petch relationship—a stress increase with grain size reduction. The fracture statistics are analyzed using a Weibull distribution, and a Weibull modulus m of 6.4 and 4.5 is found for the growth and substrate side under tension, respectively. Young’s modulus E = 1072 ± 153 GPa for polycrystalline diamond is evaluated from the same tests. © Pleiades Publishing, Ltd., 2011.
引用
收藏
页码:439 / 444
页数:5
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