Very high-speed ultraviolet photodetectors fabricated on GaN

We report on the temporal and the frequency response of both metal-semiconductor-metal (MSM) and p-i-n ultraviolet photodetectors fabricated on single-crystal GaN. The best MSM devices show a fast 10–90% rise-time of ∼28 psec under comparatively low ultraviolet excitation of ∼0.1 W/cm2 averagerirradiance. The fast-Fourier transform (FFT) of the pulse response data indicates a bandwidth, f3dB, of ∼3.8 GHz at a reverse bias of 25 V. This agrees well with the direct frequency response measurement value of ∼3.5 GHz. For the p-i-n devices, we measured a rise-time of ∼43 psec at 15 V reverse bias for a 60 µm diameter mesa with 1 µm thick intrinsic region. The FFT of the p-i-n pulse response obtains f3dB ≈1.4 GHz. Analysis in terms of reverse bias and geometric scaling indicates that the MSM photodetectors are transit-time limited. The p-i-n devices also show evidence of transit-time limited effects based on trends with respect to reverse bias and intrinsic region thickness. However, our larger area p-i-n devices show clear evidence of RC-limited behavior. Modeling of the temporal behavior indicates that a slow component in the time and frequency response data is a consequence of the hole drift velocity. We have also found preliminary evidence of microplasmic effects in the p-i-n devices.