Eliminating phase-shift errors in interferometry

被引：8

作者：

Guzhov V.I. ^{[1
]}

Il'yinykh S.P. ^{[1
]}

Khaidukov D.S. ^{[1
]}

Vagizov A.R. ^{[1
]}

机构：

[1] Novosibirsk State Technical University, Novosibirsk 630092

来源：

基金：

俄罗斯基础研究基金会;

关键词：

incremental phase shifting; interferometry; optics;

D O I：

10.3103/S8756699011010110

中图分类号：

学科分类号：

摘要：

引用

页码：76 / 80

页数：4

共 7 条

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[3] Gao P., Yao B., Lindlein N., Et al., Phase-Shift Extraction for Generalized Phase-Shifting Interferometry, Opt. Lett., 34, 22, pp. 3553-3555, (2009)
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[5] van Wingerden J., Frankena H.J., Smorenburg C., Linear Approximation for Measurement Errors in Phase Shifting Interferometry, Appl. Opt., 30, 19, pp. 2718-2729, (1991)
[6] Korn G.A., Korn T.M., Mathematical Handbook for Scientists and Engineers, (2000)
[7] Fedina L.I., Sheglov D.V., Gutakovskii A.K., Et al., Precise Measurements of Nanostructure Parameters, Avtometriya, 46, 4, pp. 5-18, (2010)