Cleaning Procedure for Single-Crystal Tungsten Substrates

被引:0
|
作者
R. Cortenraad
S. N. Ermolov
A. W. Denier van der Gon
V. G. Glebovskii
H. H. Brongersma
A. Manenschijn
G. Gartner
E. V. Belozerov
机构
[1] Eindhoven University of Technology,Institute of Solid
[2] Russian Academy of Sciences,State Physics
[3] Philips Components,Institute of Metal Physics, Ural Division
[4] Philips Forschungslaboratorien,undefined
[5] Russian Academy of Sciences,undefined
来源
Inorganic Materials | 2001年 / 37卷
关键词
Auger; Electron Diffraction; Electron Emission; Auger Electron; Auger Electron Spectroscopy;
D O I
暂无
中图分类号
学科分类号
摘要
Single-crystal tungsten substrates produced by electron-beam melting were cleaned by annealing in an oxygen atmosphere (∼10–3Pa, ≃1500°C) for a few hours to remove adsorbed carbon and by high-temperature ultrahigh-vacuum annealing (≃2 × 10–8Pa, ≥2500°C) for a few minutes to remove residual oxygen. The process was followed by low-energy ion scattering, Auger electron spectroscopy, and low-energy electron diffraction. The carbon and oxygen adsorbed on the surface of single-crystal tungsten were found to form ordered, oriented structures. The resultant high-purity, structurally perfect W substrates were used to study electron emission in the Ba/W and Re/W systems.
引用
收藏
页码:673 / 677
页数:4
相关论文
共 50 条
  • [1] Cleaning procedure for single-crystal tungsten substrates
    Cortenraad, R
    Ermolov, SN
    van der Gon, AWD
    Glebovskii, VG
    Brongersma, HH
    Manenschijn, A
    Gartner, G
    Belozerov, EV
    INORGANIC MATERIALS, 2001, 37 (07) : 673 - 677
  • [2] Impurity composition and cleaning of the cylindrical surface of CVD single-crystal tungsten
    B. M. Zykov
    V. N. Zykova
    V. N. Lebedev
    Yu. K. Udovichenko
    Technical Physics, 2002, 47 : 742 - 751
  • [3] Impurity composition and cleaning of the cylindrical surface of CVD single-crystal tungsten
    Zykov, BM
    Zykova, VN
    Lebedev, VN
    Udovichenko, YK
    TECHNICAL PHYSICS, 2002, 47 (06) : 742 - 751
  • [4] SINGLE-CRYSTAL OXIDE SUBSTRATES
    KEIG, GA
    SOLID STATE TECHNOLOGY, 1972, 15 (09) : 53 - +
  • [5] IONIZATION ON TUNGSTEN SINGLE-CRYSTAL SURFACES
    REYNOLDS, FL
    JOURNAL OF CHEMICAL PHYSICS, 1963, 39 (04): : 1107 - &
  • [6] The expansion of tungsten single-crystal conductors
    Schonborn, H
    ZEITSCHRIFT FUR PHYSIK, 1921, 8 : 377 - 381
  • [7] FABRICATING WIRES OF SINGLE-CRYSTAL TUNGSTEN
    STINGER, K
    RESEARCH-DEVELOPMENT, 1977, 28 (09): : 49 - &
  • [8] DISLOCATION STRUCTURES IN SINGLE-CRYSTAL TUNGSTEN AND TUNGSTEN ALLOYS
    STEPHENS, JR
    METALLURGICAL TRANSACTIONS, 1970, 1 (05): : 1293 - &
  • [9] EXAMINATION OF IMPURITIES IN SINGLE-CRYSTAL TUNGSTEN
    SAVITSKIY, EM
    BUCKI, M
    BURKHANOV, GS
    KIRILLOVA, VM
    MUKHAMEDSHINA, NM
    VLASOVA, IV
    RUSSIAN METALLURGY, 1981, (05): : 140 - 143
  • [10] DIFFUSION OF SULFUR IN TUNGSTEN SINGLE-CRYSTAL
    IOVKOV, VP
    PANOV, AS
    RYABENKO, AV
    FIZIKA METALLOV I METALLOVEDENIE, 1972, 34 (06): : 1322 - 1323