Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors

被引：0

作者：

Yu. A. Vainer

S. A. Garakhin

V. N. Polkovnikov

N. N. Salashchenko

M. V. Svechnikov

N. I. Chkhalo

P. A. Yunin

机构：

[1] Institute for Physics of Microstructures,

[2] Russian Academy of Sciences,undefined

来源：

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2019年 / 13卷

关键词：

X-ray multilayer mirror; X-ray diffraction; thin film density; coherent-scattering region; Williamson–Hall plot; aperiodic mirror;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：8 / 13

页数：5

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