Ion Beam Generation in a Vacuum Arc Ion Source with a Multicomponent Cathode

被引:0
作者
V. P. Frolova
A. G. Nikolaev
G. Yu. Yushkov
P. P. Kiziridi
N. A. Prokopenko
机构
[1] Institute of High Current Electronics of the Siberian Branch of the Russian Academy of Sciences,
[2] Tomsk State University of Control Systems and Radioelectronics,undefined
来源
Russian Physics Journal | 2021年 / 63卷
关键词
vacuum arc ion source; multicomponent ion beams; copper-chromium composite;
D O I
暂无
中图分类号
学科分类号
摘要
Vacuum arc ion sources are widely used for modifying the properties of various surfaces using ion implantation. The use of cathodes consisting of multicomponent compounds in these sources makes it possible to obtain beams of complex compositions, which expands their technological capabilities. An ion beam generated in a vacuum arc ion source with a two-component cathode made of a copper-chromium composite is studied under the conditions of a magnetic field applied to the discharge gap. It is shown that the charge state distribution of copper and chromium ions in the beam depends on their ratio in the cathode material, and the fractions of these ions in the beam correspond to their atomic content in the cathode. It is shown that the ratio of copper and chromium ions in the plasma, and, accordingly, in the ion beam, is independent of the magnetic field and corresponds to their atomic ratio in the cathode.
引用
收藏
页码:1783 / 1787
页数:4
相关论文
共 11 条
[1]  
Brown I(2018)undefined Doklady TUSURa 21 7-undefined
[2]  
Gushenets VI(2003)undefined Laser and Particle Beams 21 123-undefined
[3]  
Oks EM(2019)undefined Doklady TUSURa 21 119-undefined
[4]  
Yushkov GY(2009)undefined J. Appl. Phys. 105 043303-undefined
[5]  
Rempe NG(1997)undefined Phys. Rev. E 55 969-undefined
[6]  
Frolova VP(undefined)undefined undefined undefined undefined-undefined
[7]  
Prokopenko NA(undefined)undefined undefined undefined undefined-undefined
[8]  
Kiziridi PP(undefined)undefined undefined undefined undefined-undefined
[9]  
Yushkov GY(undefined)undefined undefined undefined undefined-undefined
[10]  
Anders A(undefined)undefined undefined undefined undefined-undefined