Laser stimulated low-temperature crystallization of amorphous silicon

被引:0
|
作者
S. A. Avsarkisov
Z. V. Jibuti
N. D. Dolidze
B. E. Tsekvava
机构
[1] Tbilisi State University,
来源
Technical Physics Letters | 2006年 / 32卷
关键词
64.10.+h; 61.50.Ks;
D O I
暂无
中图分类号
学科分类号
摘要
Laser annealing of amorphous silicon (a-Si) at different initial temperatures (77 and 300 K) has been studied. It is established that the laser-stimulated crystallization of silicon is possible at relatively low temperatures. A theoretical model is proposed, which explains this phenomenon by melting via the electron mechanism followed by recrystallization.
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页码:259 / 261
页数:2
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