Laser stimulated low-temperature crystallization of amorphous silicon

被引:0
作者
S. A. Avsarkisov
Z. V. Jibuti
N. D. Dolidze
B. E. Tsekvava
机构
[1] Tbilisi State University,
来源
Technical Physics Letters | 2006年 / 32卷
关键词
64.10.+h; 61.50.Ks;
D O I
暂无
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学科分类号
摘要
Laser annealing of amorphous silicon (a-Si) at different initial temperatures (77 and 300 K) has been studied. It is established that the laser-stimulated crystallization of silicon is possible at relatively low temperatures. A theoretical model is proposed, which explains this phenomenon by melting via the electron mechanism followed by recrystallization.
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页码:259 / 261
页数:2
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共 16 条
  • [1] Abakumov V. N.(1983)undefined Fiz. Tekh. Poluprovodn. (Leningrad) 17 2224-undefined
  • [2] Alferov Zh. I.(1985)undefined Fiz. Tverd. Tela (Leningrad) 27 3288-undefined
  • [3] Koval’chuk Yu. V.(1987)undefined Fiz. Tekh. Poluprovodn. (Leningrad) 21 2219-undefined
  • [4] Portnoĭ E. L.(1988)undefined Fiz. Tekh. Poluprovodn. (Leningrad) 22 79-undefined
  • [5] Kopaev Yu. V.(1988)undefined Fiz. Tekh. Poluprovodn. (Leningrad) 22 1190-undefined
  • [6] Menyaĭlenko V. V.(undefined)undefined undefined undefined undefined-undefined
  • [7] Molotkov S. N.(undefined)undefined undefined undefined undefined-undefined
  • [8] Baltrameyunas R.(undefined)undefined undefined undefined undefined-undefined
  • [9] Gashka R.(undefined)undefined undefined undefined undefined-undefined
  • [10] Kuokshtis E.(undefined)undefined undefined undefined undefined-undefined