Electron field emission properties of carbon nanoflakes prepared by RF sputtering

被引:0
作者
Wen-Ching Shih
Jian-Min Jeng
Jyi-Tsong Lo
Huang-Chin Chen
I-Nan Lin
机构
[1] Tatung University,Graduate Institute in Electro
[2] Tatung Company,Optical Engineering
[3] TamKang University,FED R&D Division
来源
Journal of Materials Science: Materials in Electronics | 2010年 / 21卷
关键词
Electron Field Emission; Emission Current Density; Optical Emission Spectrum; Cathode Plate; Device Fabrication Process;
D O I
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中图分类号
学科分类号
摘要
Carbon nanoflakes (CNFs) with corrugated geometry were synthesized using RF sputtering process with Ar/CH4 gas mixture. Transmission electron microscopic examination reveals that the introduction of H2 in sputtering chamber leads to the preferential etching of amorphous carbons, while maintaining integrity for the nano-crystalline phases. The proportion of nano-sized crystalline clusters is thus increased, which improved the electron field emission (EFE) properties of the materials, viz. with turn-on field of E0 = 6.22 V/μm and FEE current density of Je = 90.1 μA/cm2 at 11.0 V/μm. The cathodes made of screen printing of CNFs-Ag paste exhibit even better EFE properties than the as-deposited CNFs. The EFE of the CNFs cathodes can be turned on at E0 = 5.71 V/μm, achieving J0 = 340.1 μA/cm2 at 11.0 V/μm applied field. These results showed that the CNFs are inheritantly more robust in device fabrication process than the other carbon materials and thus possess better potential for electron field emitter applications.
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页码:926 / 931
页数:5
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