Application of atomic-force microscopy when measuring microhardness of thin coatings by scratching

被引:5
|
作者
T. A. Kuznetsova
M. A. Andreev
L. V. Markova
S. A. Chizhik
机构
[1] Institute of Powder Metallurgy of National Academy of Sciences of Belarus,
[2] Lykov Institute of Heat and Mass Transfer of National Academy of Sciences of Belarus,undefined
关键词
microhardness; scratching; thin coatings; atomic force microscopy;
D O I
10.3103/S1068366607030075
中图分类号
学科分类号
摘要
The method is proposed for determining the microhardness of thin coatings by scratching. Atomic force microscopy was applied to determine the scratch width and the optimal load on the indenter. Combined coatings 4 μm thick based on Ti, Cr, Mo2N, and alloy ZrHf obtained by the combination of electric-arc evaporation and ion nitridizing were studied. The combined coatings are shown to have better micromechanical characteristics compared to the nitride coatings deposited by the electric-arc evaporation of these refractory metals and alloys.
引用
收藏
页码:279 / 285
页数:6
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