Matching mechanical response for a MEMS vibratory tuning fork gyroscope

被引：0
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作者：
The Van Vu
Dung Quang Tran
Trinh Duc Chu
机构：
[1] Le Quy Don Technical University,
[2] Vietnam National University,undefined
来源：
Microsystem Technologies | 2020年 / 26卷
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摘要：
This paper introduces the configuration of the MEMS tuning fork gyroscope with the connecting diamond-shaped frame to achieve the anti-phase mode in the driving direction. The connecting frame is an important element to compensate for the phase deviation in two major directions in case of appearing elements that cause the phase deviation in operating such as driving force, geometric error,… The matching phase between the two tines of the TFG with this configuration is 89% and 93.67% in the driving and sensing mode, respectively. Even, the phase compensation ability of the system reaches up to 95.6% in the driving mode with increasing the equivalent stiffness of the connecting frame to four times.
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页码：3865 / 3874
页数：9
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