A numerical molecular dynamics approach for squeeze-film damping of perforated MEMS structures in the free molecular regime

Accurate determination of the squeeze-film damping in rare air is crucial for the design of high-Q MEMS devices. In the past, for the MEMS structures with no perforations, there have been two approaches to treating the squeeze-film damping in rare air: the approach based on the continuum assumption and the approach using molecular dynamics (MD) method. The amount of squeeze-film damping can be controlled by providing perforations in microstructures. To model perforation effects on squeeze-film damping, many methods have been proposed. However, almost all the previous methods are based on the continuum assumption. Only one paper focuses on analytical modeling of squeeze-film damping of a perforated microplate using the MD method. Hutcherson and Ye (J Micromech Microeng 14:1726–1733, 2004) developed a novel MD method to model the squeeze-film damping in free molecular regime. The method possesses high computational efficiency. However, their work is valid only for non-perforated rectangular microplate. This paper presents a numerical MD approach for calculating the squeeze-film damping of a perforated rectangular plate and a perforated circular plate in free molecular regime. In Hutcherson and Ye’s work, the microplate is non-perforated. After each collision with the non-perforated plate, all the molecules are reflected to the substrate. In this paper, the plate is perforated. For the molecules in the air gap striking the surface of the perforated microplate, some of the molecules are reflected to the substrate. The rest leave the air gap through the perforations. This paper is an extension of the work done by Hutcherson and Ye (J Micromech Microeng 14:1726–1733, 2004). The accuracy of the present numerical MD approach is verified by comparing its results with the experimental results available in the literature and the finite element method results.