Interference microscopy of subnanometer depth resolution: Numerical simulation

被引：0
作者：
G. N. Vishnyakov
G. G. Levin
V. L. Minaev
I. Yu. Tsel’mina
机构：
[1] All-Russian Research Institute of Optical Physical Measurements,
[2] Ramensky Instrument Engineering Plant,undefined
[3] Ramenskoe,undefined
来源：
Optics and Spectroscopy | 2013年 / 115卷
关键词：
Phase Image; Interference Microscopy; Calculation Block; Coherent Noise; Interference Image;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present results of numerical simulation performed with the aim to study the possibility of measuring subnanometer-range roughness parameters using an automated interference Linnik microscope with a white-light source. It is shown that reconstruction noises of phase images can be reduced to 0.1 nm when using averaging of interferograms and phase images.
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页码：931 / 937
页数：6
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