Determining the Size of the EUV Laser-Plasma Source for a Microscope

被引：0
|
作者：
D. G. Reunov
I. V. Malyshev
A. A. Perekalov
A. N. Nechay
N. I. Chkhalo
机构：
[1] Institute of Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
EUV microscopy; laser-plasma source; certification of laser plasma parameters; emission spectra; gas-jet targets;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：859 / 864
页数：5
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