Photonic crystal waveguides by direct writing of e-beam on self-assembled photonic crystals

被引:0
作者
SUNITA KEDIA
R VIJAYA
机构
[1] Indian Institute of Technology Bombay,Department of Physics
来源
Bulletin of Materials Science | 2011年 / 34卷
关键词
Photonic crystals; waveguides; electron beam lithography;
D O I
暂无
中图分类号
学科分类号
摘要
Direct electron beam lithography technique is used for writing a variety of waveguide structures on thin films of polymethyl methacrylate (PMMA) and self-assembled three-dimensionally ordered photonic crystals made up of PMMA colloidal spheres. The waveguide structures fabricated on both these type of samples are characterized by scanning electron microscope and optical microscope images.
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页码:383 / 388
页数:5
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共 52 条
[1]  
Ferrand P(2003)undefined Appl. Phys. Lett 25 5289-undefined
[2]  
Egen M(2004)undefined Microelectron. Eng 73–74 362-undefined
[3]  
Zentel R(2003)undefined Chinese J. Phys 5 535-undefined
[4]  
Seekamp J(1987)undefined Phys. Rev. Lett 23 2486-undefined
[5]  
Romanov SG(1995)undefined Phys. Rev. Lett 17 3419-undefined
[6]  
Torres CMS(2003)undefined Nature 424 847-undefined
[7]  
Ferrand P(1995)undefined Appl. Phys. Lett 25 3715-undefined
[8]  
Seekamp J(2008)undefined Appl. Phys A90 559-undefined
[9]  
Egen M(2010)undefined Prog. Quant. Electr 34 89-undefined
[10]  
Zentel R(2004)undefined J. Vac. Sci. Technol B22 3348-undefined