Design and Testing of a Novel Two-Axial Flexure-Based Vibration Stage

被引:0
作者
Yunsong Du
Pengchao Dang
Tiemin Li
机构
[1] Beijing University of Technology,Faculty of Materials and Manufacturing
[2] Beijing University of Technology,College of Mechanical Engineering and Applied Electronics Technology
[3] Tsinghua University,Manufacturing Engineering Institute, Department of Mechanical Engineering
来源
Journal of Vibration Engineering & Technologies | 2022年 / 10卷
关键词
Flexure-based mechanism; Flexure hinge; Transverse sensitivity; Vibration stage; Measurement uncertainty;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:499 / 509
页数:10
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