Transparent and passive Ta–Si–N thin films barrier layer

被引：0

作者：

Alexis Harmon

Darnell Robertson

Mehran Elahi

Bijandra Kumar

Adetayo Adedeji

机构：

[1] Elizabeth City State University,Department of Mathematics, Computer Science and Engineering Technology

[2] Elizabeth City State University,Department of Natural Sciences

来源：

MRS Communications | 2021年 / 11卷

关键词：

Thin film ; Sputtering; Diffusion; Barrier layer;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：950 / 954

页数：4

共 117 条

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