Microfabrication of Silicon-Based Nanoporous Particulates for Medical Applications

被引：0
|
作者：
Michael H. Cohen
Kristie Melnik
Anthony A. Boiarski
Mauro Ferrari
Frank J. Martin
机构：
[1] iMEDD,
[2] Inc.,undefined
[3] The Ohio State University,undefined
来源：
Biomedical Microdevices | 2003年 / 5卷
关键词：
Silicon; Dioxide; Silicon Dioxide Particle; Medical Application; Porous Silicon;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Micron sized particles with nanometer sized pores have been fabricated out of porous silicon and porous silicon dioxide. The porous silicon particles are shaped as hemispherical shells and the porous silicon dioxide particles are asymmetrical squares.
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页码：253 / 259
页数：6
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