Three-dimensional image reconstruction of V-grooves for damage analysis

被引:0
|
作者
Yu-Hsuan Lin
Chih-Chung Yang
Tai-San Liao
Han-Chao Chang
Kuo-Cheng Huang
机构
[1] National Applied Research Laboratories,Instrument Technology Research Center
来源
Optical Review | 2014年 / 21卷
关键词
V-groove; 3D reconstruction; wafer sawing;
D O I
暂无
中图分类号
学科分类号
摘要
In this paper, a novel method for the analysis of damaged V-grooves is presented. An optical sectioning system and image processing software were developed to determine the width of V-grooves at various heights. We succeeded in constructing a three-dimensional (3D) topographic image, which enabled the estimation of damage in each region of the V-groove. The necessity of replacing damaged wire guide rollers can be determined according to whether the damage in the V-grooves exceeds a given threshold. By altering the sampling rate, the proposed system can achieve an optimal balance between resolution and measurement speed. The proposed innovations represent a novel solution for engineering inspection technology and related applications.
引用
收藏
页码:719 / 722
页数:3
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