A 3D-Printed Microresonator Based on the Quartz-Enhanced Photoacoustic Spectroscopy Sensor for Methane Detection

A 3D-printed microresonator based on a quartz tuning fork has been developed. The sensor performance is evaluated by detection of methane with a fiber-coupled distributed feedback diode laser. In combination with wavelength modulation spectroscopy, a minimum detectable concentration of 15.6 ppb by volume is achieved at atmospheric pressure with an 8-mW average optical excitation power and a lock-in amplifier time constant of 1 s, which corresponds to a 1σ normalized noise equivalent absorption coefficient of 5·10–9 cm–1·W/Hz1/2. An Allan variance analysis shows that the system has long-term stability and can serve as the basis for a portable gas analyzer. Approaches to improve the current sensor performance are also discussed. This design greatly reduces the time of manufacturing the microresonator.