A compact polarization-integrated long wavelength infrared focal plane array based on InAs/GaSb superlattice

被引:0
作者
Jian Zhou
Yi Zhou
Ying Shi
Fangfang Wang
Zhicheng Xu
Zhizhong Bai
Min Huang
Lulu Zheng
Zhaoming Liang
Yihong Zhu
Qingqing Xu
Yiming Shen
Xiangxiao Ying
Jianxin Chen
机构
[1] Chinese Academy of Sciences,Key Laboratory of Infrared Imaging Materials and Devices, Shanghai Institute of Technical Physics
[2] University of Chinese Academy of Sciences,Hangzhou Institute for Advanced Study
来源
Science China Information Sciences | 2022年 / 65卷
关键词
LWIR; polarization integration; infrared detector; optical crosstalk; extinction ration;
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中图分类号
学科分类号
摘要
Real-time polarization imaging plays a vital role in target detection, recognition, and tracking in complex scenes. However, large optical crosstalk and the integration technology are difficult problems in the development of polarization-integrated infrared detectors. We demonstrate a monolithic long wavelength infrared (LWIR) InAs/GaSb superlattice focal plane array (FPA) integrated with the polarizer. To obtain high performance and real-time polarization imaging device, the parameters of the grating were optimized and the optical crosstalk between adjacent polarization bands was studied. We analysis the light diffraction depending on the distance between the polarizer and photosensitive elements, and the coupling between oblique incident light and device. The fabrication process of the antireflective polarizer, the integration technology of polarizer and the FPA composed of 512×4×3 pixels were explored. Finally, a polarization integrated focal plane array (PI-FPA) was fabricated to detect polarized light with different oscillating directions. The large response extinction ratio of corresponding polarization bands was measured as 50:1, 49:1, and 44:1 of 0°, 60°, and 120°, respectively.
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